Paper Title
Synthesis and Electrical Properties of (Ca0.8Sr0.2) ZrO3 Thin Films

Abstract
This paper describes physical and dielectric properties of (Ca0.8Sr0.2)ZrO3 on n-type Si substrate were fabricated by sol-gel method. Particular attention will be paid to the effects of preheating temperature and annealing temperature on the physical and dielectric properties. The (Ca0.8Sr0.2)ZrO3 films were characterized using X-ray diffraction (XRD) and scanning electron microscopy (SEM). The kinetic energies of the deposited atoms increased resulted in a microstructural improvement of the deposited (Ca0.8Sr0.2) ZrO3 thin films with increasing thermal treatments. Keywords - Sol-Gel Method, (Ca0.8Sr0.2) ZrO3 Thin Film, Electrical Properties, Microstructure